Tokyo, Japan — September 3, 2024

Leading Semiconductor Manufacturer Samsung Electronics and Tokyo Electron (TEL) are collaborating in an innovative project to advance Extreme Ultraviolet (EUV) lithography techniques.

Tokyo Electron (TEL) and Acrevia GCB: A New Partnership for EUV Improvement

TEL, a global leader in semiconductor equipment, has partnered with Acrevia GCB, a subsidiary of the company, to develop and test new equipment designed to refine the EUV lithography process. This partnership aims to push the boundaries of chip manufacturing, potentially leading to more efficient and precise production of next-generation semiconductors.

Detailed Collaboration and Equipment Innovations

The collaboration involves the implementation of a Gas Cluster Beam (GCB) system, a technology that TEL and Acrevia GCB are pioneering. This system is designed to improve the EUV lithography process, enabling higher throughput and greater yield in semiconductor fabrication. The GCB system is currently being tested with the capability to handle up to 7 to 8 wafers at a time, a significant enhancement compared to previous methods.

The EUV lithography process is crucial for the production of advanced semiconductor chips, which are the backbone of modern electronics. By improving the EUV process, Samsung Electronics can potentially reduce the time and cost of manufacturing these chips, leading to faster product development cycles and more competitive offerings in the market.

Impact on Samsung Electronics’ Centura Sculpta System

Samsung Electronics is currently utilizing the Centura Sculpta system for EUV lithography, but the partnership with TEL and Acrevia GCB is expected to provide a competitive edge by potentially replacing or enhancing the Centura Sculpta system. This new system could offer increased efficiency, better precision, and possibly lower defect rates, contributing to a higher overall yield in chip production.

Future Prospects and Market Implications

The successful integration of Acrevia GCB equipment could lead to a significant improvement in Samsung Electronics’ ability to produce next-generation chips. This not only benefits Samsung but also has broader implications for the semiconductor industry as a whole. It could spur innovation and set new standards for chip manufacturing technology, influencing global semiconductor markets.

Market Reception and Industry Reaction

Industry analysts and semiconductor experts are closely monitoring the developments between Samsung Electronics and Tokyo Electron. The partnership is seen as a significant step towards advancing EUV lithography technology, potentially revolutionizing the way semiconductors are produced. The collaboration is expected to increase interest in TEL’s Acrevia GCB equipment, leading to increased sales and market share for the company.

Conclusion

The joint venture between Samsung Electronics and Tokyo Electron, with Acrevia GCB at the heart of the project, signifies a commitment to pushing the boundaries of semiconductor manufacturing. This partnership could lead to breakthroughs in EUV lithography, setting new benchmarks for the industry and potentially influencing the future of chip technology.

References:
C114 News
The Elec

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